Silicon-On-Insulator(SOI) wafers
WaferHome can manufacture the IC Grade（等级） Silicon-On-Insulator(SOI) wafers
Specification for Silicon-On-Insulator(SOI) Wafer
| All over wafer | device layer | buried oxided layer | handle layer | ||||||
|---|---|---|---|---|---|---|---|---|---|
| Grade | resisitivity | Geometric parameter | Dimeter | Type/dopant |
Orientaion |
thickness | thickness | Orientaion |
Surface/Roughness |
| Bonding SOI wafer | customization | TTV < 5um Bow< 40um warp <40um | 25.4mm 50.8mm 76.5mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation |
1-30+/-1um customization | 0.1-7um |
<100> <111> or special orientation |
polished/polished |
| customization | TTV < 5um Bow< 40um warp <40um | 100mm 125mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | 1-30um customization | 0.1-7um | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 40um warp <40um | 150mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | 1-30um customization | 0.1-7um | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 40um warp <40um | 200mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | 1-30um customization | 0.1-7um | <100> <111> or special orientation | polished/etched polished/polished | |
| SIMOX SOI wafer | customization | TTV < 5um Bow< 20um Warp <20um | 25.4mm 50.8mm 76.5mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation |
10-500nm | 0.1-7um |
<100> <111> or special orientation |
polished/etched polished/polished |
| customization | TTV < 5um Bow< 20um Warp <20um | 100mm 125mm 150mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | 10-500nm | 0.1-7um | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 20um Warp <20um | 200mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | 10-500nm | 0.1-7um | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 20um Warp <20um | 300mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | 10-500nm | 0.1-7um | <100> <111> or special orientation | polished/etched polished/polished | |
| Pattern Bonding SOI wafer (pattern customization) | customization | TTV < 5um Bow< 40um warp <40um | 25.4mm 50.8mm 76.5mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation |
customization | 0.0001 - 200 Ohm-cm /Customization |
<100> <111> or special orientation |
polished/etched polished/polished |
| customization | TTV < 5um Bow< 40um warp <40um | 100mm 125mm 150mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | customization | 0.0001 - 200 Ohm-cm /Customization | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 40um warp <40um | 200mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | customization | 0.0001 - 200 Ohm-cm /Customization | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 40um warp <40um | 300mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | customization | 0.0001 - 200 Ohm-cm /Customization | <100> <111> or special orientation | polished/etched polished/polished | |
| Silicon On Silicon | customization | TTV < 5um Bow< 20um Warp <20um | 25.4mm 50.8mm 76.5mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation |
customization | 0.0001 - 200 Ohm-cm /Customization |
<100> <111> or special orientation |
polished/etched polished/polished |
| customization | TTV < 5um Bow< 20um Warp <20um | 100mm 125mm 150mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | customization | 0.0001 - 200 Ohm-cm /Customization | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 20um Warp <20um | 200mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | customization | 0.0001 - 200 Ohm-cm /Customization | <100> <111> or special orientation | polished/etched polished/polished | |
| customization | TTV < 5um Bow< 20um Warp <20um | 300mm | P(Boron) N(Phos/As/Sb) | <100> <111> or special orientation | customization | 0.0001 - 200 Ohm-cm /Customization | <100> <111> or special orientation | polished/etched polished/polished | |
| Silicon-on-Glass(SOG) | customization | 100mm 125mm 150mm | 1 - 300um | ||||||
| 100mm 125mm 150mm | 100 -1000nm | ||||||||
| Gemanium-on-Insulator(GeOI) | customization | 100mm 125mm 150mm | 1 - 300um | ||||||
| 100mm 125mm 150mm | 100 -1000nm | ||||||||
| 100mm 125mm 150mm | customization | ||||||||
| Sappire on Silicon(SOS) | customization | 100mm 125mm 150mm | 1 - 300um | ||||||
| 100mm 125mm 150mm | 100 -1000nm | ||||||||
| 100mm 125mm 150mm | customization | ||||||||
| Sappire on Glass(SOG) | customization | 100mm 125mm 150mm | 1 - 300um | ||||||
| 100mm 125mm 150mm | 100 -1000nm | ||||||||